화학공학소재연구정보센터
Solid-State Electronics, Vol.114, 9-13, 2015
Pickup impact on high-voltage multifinger LDMOS-SCR with low trigger voltage and high failure current
The impact of inserting P+ pickup on high-voltage multi-finger laterally diffused metal-oxide-semiconductor-silicon-controlled rectifier (LDMOS-SCR) has been studied in this article. Four-finger LDMOS-SCR structures with finger length of 50 mu m using 0.5 mu m 18 V complementarily diffused metal oxide semiconductor (CDMOS) process were fabricated and tested. Theoretical analysis is carried out to make detailed comparisons between LDMOS-SCR with and without P+ pickup. It verifies that the multi-finger LDMOS-SCR with P+ pickup has greater electrostatic discharge (ESD) robustness and effectiveness. Furthermore, transmission line pulse (TLP) test has been done and the results show that the trigger voltage (V-t1) of the LDMOS-SCR with P+ pickup remarkably decreases from 46.19 to 35.39 V and the second breakdown current (I-t2) effectively increases from 8.13 to 10.08 A. (C) 2015 Elsevier Ltd. All rights reserved.