화학공학소재연구정보센터
Thin Solid Films, Vol.592, 232-236, 2015
HfO2/SiO2 multilayer enhanced aluminum alloy-based dual-wavelength high reflective optics
Laser durable multiband high reflective optics can be attained by depositing HfO2/SiO2 stacks on diamond-turned and optically polished aluminum alloy substrates. HfO2 and SiO2 single layers were prepared using modified plasma-ion assisted deposition. Ellipsometric measurements were performed using two types of variable angle spectroscopic ellipsometry with a combined spectral range of 150 nm to 14 mu m. Optical constants were generated in the entire spectral range. Scatter loss as a function of surface roughness was calculated at 1064 nm, 1572 nm, and 4.1 mu m, representing a primary wavelength, a secondary wavelength, and a middle wave infrared band selected for a dual-wavelength laser beam expander, respectively. The surface requirement of the aluminum alloy substrates was determined. Calculated and measured spectral reflectances were compared. Laser-induced damage threshold tests were performed at 1064 nm, 20 ns, and 20 Hz. A laser-induced damage threshold of 47 J/cm(2) was determined. Post-damage analysis suggests that nodule defects are the limiting factor for the laser-induced damage threshold. Surface modification of the aluminum alloy was identified as a potential technical solution that may further increase the laser damage resistance of the dielectric enhanced dual-wavelength reflective optics. (C) 2015 Elsevier B.V. All rights reserved.