YBa2Cu3O7 - delta (YBCO) films were prepared at deposition rates ranging from 10 to 55 mu m h(-1) on CeO2/LaMnO3/MgO/Gd2Zr2O7/Hastelloy C276 substrate by spray atomizing and coprecipitating laser chemical vapor deposition. At a deposition rate of 10 mu m h(-1), a c-axis-oriented YBCO film with a high critical temperature (T-C) of 91 K and critical current density (J(C)) of 2.4 MA cm(-2) was prepared, which showed an epitaxial growth mode of YBCO [001]//CeO2 [100] (YBCO [100]//CeO2 [011]). The full width at half maximum (FWHM) of the omega-scan and that of the phi-scan of the YBCO film were 1.9 degrees and 3.2 degrees, respectively. At a deposition rate of 45 mu m h(-1), an a-axis-oriented YBCO film with a T-C of 78 K and a J(C) of 0.4 MAcm(-2) was obtained. The YBCO film showed an epitaxial growth mode of YBCO [100]//CeO2 [100] (YBCO [001]//CeO2 [011]) and had the FWHM of 4.9 degrees for the omega-scan and that of 9.5 degrees for the f-scan, respectively. (C) 2016 Elsevier B.V. All rights reserved.