Atomic force microscope ( AFM) lithography based on localized current injection was carried out for fabricating nanostructures of metal oxide on tantalum ( Ta). Fabricated nanopatterns of tantalum oxide ( Ta2O5) were selectively etched by magnetically enhanced inductively coupled plasma ( MEICP) etching system. Nanopatterns of Ta with feature size in the range of a few tens-hundreds nm were successfully fabricated.