Phosphorus and Boron Doping Effects on Solid-Phase Recrystallization of Polycrystalline Silicon Films Amorphized by Germanium Ion-Implantation (Vol 15, Pg 343, 1996)

Kang MK; Yamamoto T; Matsui T; Kuwano H

Journal of Materials Science Letters, Vol.15, No.19, 1740-1740, 1996

Kang MK, Yamamoto T, Matsui T, Kuwano H