In this study, liquid crystal (LC) alignment effects for homeotropic alignment on the SiOx thin film by electron beam evaporation method with electron beam system and electro-optical (EO) performances of homeotropic aligned liquid crystal display (LCD) were studied. Also, the control of pretilt angles of homeotropic aligned LC on SiOx thin film as a function of thin film thickness were investigated. The uniform vertical LC alignment on the SiOx thin film surfaces with electron beam evaporation was achieved in any of the thin film thickness conditions. It is considered that the LC alignment on the SiOx thin film by electron beam evaporation is attributed to the elastic interaction between LC molecules and micro-grooves at the SiOx thin film surface created by evaporation. In addition, LC cell of the SiOx thin film by electron beam evaporation had good EO property.