We have prepared the CaF2:Mn thin films on several buffer layer-coated glass substrates by electron beam evaporation method and investigated their structural and electroluminescent characteristics. The experimental results show that the diffraction peaks in the X-ray patterns of CaF2:Mn thin films correspond to the cubic fluorite phase. In addition, the crystallinity and orientation plane of the films strongly depend on kinds of buffer layer. The CaF2:Mn thin film electroluminescent devices show the blue emission of the 495 nm peak, originating from the T-4(1g)((4)G) -> (6)A(1g)(S-6) dipole-dipole transition of Mn2+ ions in the O-h crystal field.