We have succeeded in inducing uniform alignment of liquid crystal (LC) molecules by using end-functionalized-perfluoropolyether (PFPE) (Fluorocur (R) made by Liquidia Technologies) films exposed to linearly polarized ultraviolet light (LPUVL). The average orientation direction of LC molecules was parallel to the polarization direction of LPUVL, which is opposite to most cases of other photo-alignment treatments. In the photo-alignment treatment, use of deep UV light and the existence of oxygen in the atmosphere was found to be important for inducing uniform LC alignment.