Hybrid materials made from titanium alkoxide (TA) (Ti(OCH2CH(C2H5)C4H9)4) and alkoxysilane-terminated polydimethylsiloxane (PDMS) in different TA/PDMS ratio was prepared and characterized. Gel fraction, mechanical strength, dielectric strength and thermal endurance of hybrids made from TA and alkoxysilane-terminated PDMS increased more than that of conventional hybrids made from silanol-terminated PDMS. Tensile strength, dielectric strength, and thermal endurance were improved with increase in TA/PDMS ratio. These results suggest that utilizing alkoxysilane-terminated PDMS and TA as raw material is useful for improving the electrical insulating property, thermal endurance, and mechanical property of PDMS-based hybrids.