We present the characteristics of titanium dioxide (TiO2) inorganic film deposited by RF magnetron sputtering for liquid crystal display applications in this paper. TiO2 films supported vertically aligned liquid crystal (LC) molecules based on ion-beam (IB) irradiation time dependence. Uniform alignment was obtained only when the incident time was two minutes with 1.8 keV of incident energy and an incident angle of 45 degrees. Energy from uniform high-density plasma by IB irradiation affected the interaction between the TiO2 layer and LC molecules to produce vertical alignment of the LC molecules.