It was tried to fabricate a template substrate having a 3-dimensional structure with micrometer- size diameter in order to extend the p-n junction area of the compound thin film solar cell. The ZnO micro rod layer, which was grown vertically by using the chemical bath deposition, was successfully fabricated as a hexagonal shape along the c-axis which is the preferred growth orientation. The growth of ZnO rod being adequate for device applications was examined through investigating growth mechanism of ZnO rod and optimizing the photo resist profile so as to remove the undercut which was found in the grown ZnO rod. The growth model and material properties of the 3-dimensional ZnO rod were analyzed through the scanning electron microscope.