A transmission electron microscope and a scanning transmission electron microscope were used to investigate the structural properties of CdS thin films. The monograin of CdS thin film was looked at using TEM measurements. In the selected area, the diffraction pattern of the CdS films shows a pattern of circular dots. This implies that the CdS films have weakly preferred orientation properties, which is in good agreement with the data from the XRD measurements. In this study, various measurement techniques using TEM were utilized to study the structural properties of CdS thin films.