화학공학소재연구정보센터
Molecular Crystals and Liquid Crystals, Vol.591, No.1, 86-90, 2014
Measuring the Electrical Conductivity of Carbon Nanotubes Grown on Sodalime Glass Substrates using Cu as Catalyst
We have studied the electrical resistance of carbon nanotubes (CNTs) grown on sodalime glass using Cu as catalyst at 580 degrees C temperature. The conductivity was measured at room temperature using four point probe technique. The Cu catalyst was coated on glass substrate by using dc magnetron sputtering system and etched by hydrogen (H-2) gas in order to form nanometer sized catalytic particles. Mixture of C2H2/H-2/Ar (20:80:100 standard centimeter cubic per minutes) gases were heated at 580 degrees C for growth of CNTs on a glass substrate by using Thermal Chemical Vapor Deposition (TCVD). The temperature dependence of sheet resistance and current-voltage characteristics of the film were measured by a four point probes method. The morphology of the catalyst surface was probed by Atomic Force Microscopy (AFM), and the growth behavior of CNTs was investigated by scanning electron microscopy (SEM).