Effect of Al2O3-ZrO2 Composite Oxide Thickness on Electrical Properties of Etched Al Foil

Fei Chen; Sang-Shik Park

Korean Journal of Materials Research, Vol.26, No.3, 160-165, March, 2016

DOI10.3740/MRSK.2016.26.3.160 Export Citation

Effect of Al2O3-ZrO2 Composite Oxide Thickness on Electrical Properties of Etched Al Foil

Fei Chen, and Sang-Shik Park^†

School of Nano Materials Engineering, Kyungpook National University, Gyeongbuk 41566, Republic of Korea

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To increase the capacitance of an Al electrolytic capacitor, the anodic oxide film, Al2O3, was partly replaced by an Al2O3-ZrO2 (Al-Zr) composite film prepared by the vacuum infiltration method and anodization. The microstructure and composition of the prepared samples were investigated by scanning electron microscopy and transmission electron microscopy. The coated and anodized samples showed multi-layer structures, which consisted of an inner Al hydrate layer, a middle Al-Zr composite layer, and an outer Al2O3 layer. The thickness of the coating layer could go up to 220 nm when the etched Al foil was coated 8 times. The electrical properties of the samples, such as specific capacitance, leakage current, and withstanding voltages, were also characterized after anodization at 100 V and 600 V. The capacitances of samples with ZrO2 coating were 36.3% and 27.5% higher than those of samples without ZrO2 coating when anodized at 100 V and 600 V, respectively.

Keywords:sol-gel;multi-layer film;anodization;capacitance;anodic oxide film

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[1] Alwitt RS, Uchi H, Beck TR, Alkire RC, J. Electrochem. Soc., 131, 13 (1984)

[2] Takahashi H, Nagayama M, Electrochim. Acta, 23, 279 (1978)

[3] Chen CT, Hutchins GA, J. Electrochem. Soc., 132, 1567 (1985)

[4] Chiu RL, Chang PH, Tung CH, Thin Solid Films, 260(1), 47 (1995)

[5] Chang JK, Lin CM, Liao CM, Chen CH, Tsai WT, J. Electrochem. Soc., 151(3), B188 (2004)

[6] Ban CL, He YD, Shao X, Trans. Nonferrous Met. Soc. China, 21, 133 (2011)

[7] Park SS, Lee BT, J. Electroaceram., 13, 111 (2004)

[8] Sunada M, Takahashi H, Kikuchi T, Sakairi M, Hirai S, J. Solid State Electrochem., 11, 1375 (2007)

[9] Wang YH, Yang J, Wang JZ, Ceram. Int., 34, 1285 (2008)

[10] Du X, Xu Y, Surf. Coat. Technol., 202, 1923 (2008)

[11] Liu J, Guo Q, Yu M, Li S, Yao L, ECS J. Solid state Sci. Technol., 2, N55 (2013)

[12] Chen F, Park SS, ECS J. Solid state Sci. Technol., 4, P293 (2015)

[13] Uchi H, Kanno T, Alwitt RS, J. Electrochem. Soc., 148(1), B17 (2001)

[14] Alwitt RS, Dyer CK, Noble B, J. Electrochem. Soc., 129, 711 (1982)