Previous Article Next Article Table of Contents Journal of Materials Science Letters, Vol.16, No.11, 941-945, 1997 DOI10.1023/A:1018560826654 Export Citation Effects of Deposition Conditions on Physical-Properties and Stresses of Pt and (Al, Si)O-X Thin-Films Lee JS, Park JW, Park JS, Park HD, Shin SM Keywords:INTERNAL-STRESS;MOLYBDENUM;ALUMINUM Please enable JavaScript to view the comments powered by Disqus.
