Previous Article Next Article Table of Contents Journal of Materials Science Letters, Vol.17, No.11, 947-949, 1998 DOI10.1023/A:1026464623138 Export Citation Surface passivation technique for selective hole filling by chemical vapor deposition Rhee SW, Yun JH Keywords:DIMETHYLETHYLAMINE ALANE;TITANIUM;FILMS Please enable JavaScript to view the comments powered by Disqus.
