Advanced Materials, Vol.27, No.35, 5223-5229, 2015
Low-Temperature Synthesis of Large-Scale Molybdenum Disulfide Thin Films Directly on a Plastic Substrate Using Plasma-Enhanced Chemical Vapor Deposition
Keywords:flexible sensor;low temperature;molybdenum disulfide (MoS2);plasma-enhanced chemical vapor deposition (PECVD);plastic substrate