Previous Article Next Article Table of Contents Journal of Materials Science Letters, Vol.17, No.17, 1483-1486, 1998 DOI10.1023/A:1026434619677 Export Citation The role of sulfur during Mo etching using SF6 and Cl-2 gas chemistries Baek KH, Yun SJ, Park JM, Yoon YS, Nam KS, Kwon KH, Kim CI Keywords:SILICIDATION Please enable JavaScript to view the comments powered by Disqus.
