Previous Article Next Article Table of Contents Journal of Materials Science Letters, Vol.17, No.22, 1899-1901, 1998 DOI10.1023/A:1006696007150 Export Citation Influence of substrate nature on the microstructure of LPCVD silicon films Caussat B, Couderc JP, Scheid E, Bourgerette C, de Mauduit B Keywords:THIN-FILMS Please enable JavaScript to view the comments powered by Disqus.
