Previous Article Next Article Table of Contents Journal of Materials Science Letters, Vol.18, No.15, 1197-1200, 1999 DOI10.1023/A:1006642016630 Export Citation Additive oxygen effects in Cl-2 plasma etching of chrome films Kwon KH, Kang SY, Park SH, Sung HK, Kim DK, Moon JH Keywords:TRANSISTORS Please enable JavaScript to view the comments powered by Disqus.
