Imidazolium salt type ionic liquids containing cyclic siloxane frameworks were successfully prepared by the hydrolytic condensation of 1-[3-(dimethoxymethylsilyl)propyl]-3-methylimidazolium chloride, which was synthesized by the reaction of 3-chloropropyldimethoxymethylsilane and 1-methylimidazole, using the superacid catalysts bis(trifluoromethane-sulfonyl)imide and trifluoromethanesulfonic acid.