Low thermal conductivity, high electrical conductivity, and high Seebeck coefficient are required for thermoelectric materials. To independently control electrical and thermal conductivity, Au nanoparticles were incorporated into mesoporous TiO2 nanocomposite thin films With increase of Au nanoparticle concentration and annealing time, ordered pore structure gradually collapsed. As porosity and pore structure changed, the electrical resistivity decreased from 142.9 to 41.6 Omega cm. In this work, Au nanoparticle concentration and annealing conditions were investigated to optimize the thermoelectric properties.