Previous Article Next Article Table of Contents Journal of Materials Science Letters, Vol.19, No.7, 537-538, 2000 DOI10.1023/A:1006722205010 Export Citation Low temperature growth of beta-FeSi2 films on Si(111) by RF magnetron sputtering using a FeSi2 alloy target Yoshitake T, Hanada T, Nagayama K Please enable JavaScript to view the comments powered by Disqus.
