A synthesis of new types of Si/C composite anodes for lithium -ion batteries is reported. Thin layers of graphitic carbon decorated in 3D with Si nanoparticles were produced from liquid organic precursors-1-phenyl-2trimethylsilylacetylene and triethoxy(octyl)silane, using a one-step microwave plasma chemical vapor deposition (MPCVD) method. Thin-film Si/C electrodes were electrochemically tested in lithium half cells and produced a good reversible capacity of up to 900 mAh g-1 (after 100 cycles) and -370 mAh g(-1), depending on the precursor type. The electrode easily endured 100 cycles at 1C rate with only a 10% loss in capacity. (C) 2016 Elsevier B.V. All rights reserved.