This manuscript reports a study of the ionic conductivity of radiofrequency sputter deposited, lithium phosphorous oxy-nitride (LIPON), solid state electrolyte amorphous thin films. Films having compositions near Li2.5PO3.5N0.5 were deposited under varying conditions of process gas, substrate bias, and deposition temperature. To understand the variations in ionic conductivity observed, the films were extensively characterized to examine structural and compositional differences, including examination by x-ray photoelectron spectroscopy (XPS), inductively coupled plasma-optical emission spectroscopy, and spectroscopic ellipsometry. For the XPS study, depth profiling was used to allow a critical examination of the role of triply coordinated nitrogen in the ionic conductivity of LIPON. The highest ionic conductivity of 9.8 x 10(-6) S/cm was obtained at an elevated deposition temperature and is correlated to a reduced density of defects, as indicated from the optical characterization. (C) 2016 Elsevier B.V. All rights reserved.