In this study, nanofluidic devices were fabricated using Unity (R) 4671E, a decomposable, negative tone resist. Cavities as large as 2.5 mm and channels as small as 30 nm were fabricated with the same process. Water was successfully flowed through the devices and the flow was characterized for a 500 nm channel. (C) 2010 American Vacuum Society. [DOI: 10.1116/1.3517701]