Drying is a critical step in the fabrication of ceramic microparts from suspensions using soft lithography. In this communication, a simple method using a hydrophobic flexible polymer substrate was demonstrated to avoid the formation of cracks within ceramic microparts. Crack-free alumina green microchannel parts with 120 m feature size were attained on a polyethylene film. The results show that both the hydrophobic and flexible properties of the polymeric substrates can remove the substrate constraint to the green body of micropart, which is capable of preventing cracks formation. The method can be used to fabricate ceramic microparts/micropatterns for microeletromechanical systems and functional thick ceramic films.