In the present paper, a silica-alumina composite membrane for hydrogen separation was prepared within an a-alumina support by the multi-step pore modification. The alpha-alumina support has an asymmetric structure composed of a thin dense skin layer and a thick coarse layer and the average pore size of its skin layer is 80 nm. The composite membrane layer was formed in the vicinity of the interphase between the two layers of the support by two consecutive steps; namely, in situ silica sol-gel reaction and soaking and vapor deposition. In order to enhance the hydrogen selectivity, palladium (Pd) particles were impregnated in the final step utilizing Pd-acetate as a Pd precursor. Although both silica and Pd induced the surface diffusion, Pd was more effective for selective hydrogen adsorption than silica. This multi-step method produced a porous membrane with moderate hydrogen selectivity and satisfactory hydrogen permeance at high temperature and at high transmembrane pressure. The separation factor of hydrogen relative to nitrogen was maintained at about 10 even when the transmembrane pressure was as high as 110 kPa, and the hydrogen permeance was still much higher than that of non-porous polymeric membranes. In addition, the microstructural distributions of Si and Pd within the intermediate membrane layer were examined by a scanning electron microscopy (SEM) and an energy dispersive X-ray analysis (EDX)