Solid-State Electronics, Vol.120, 25-31, 2016
Half-Corbino short-channel amorphous In-Ga-Zn-O thin-film transistors with a-SiOx or a-SiOx/a-SiNx passivation layers
We investigated the electrical properties and stability of short-channel half-Corbino amorphous In-Ga-Zn-O (a-IGZO) thin-film transistors (TFTs). In the linear region, the fabricated half-Corbino a-IGZO TFT with a channel length of 4.5 mu m achieves a geometrical factor (f(g)) of similar to 2.7, a threshold voltage (V-T) of similar to 2.4 V, a field-effect mobility (mu(eff)) of similar to 15 cm(2)/Vs, a subthreshold swing (SS) of similar to 320 mV/dec and an off-current (I-OFF) < 10 (13) A. In the saturation region, asymmetric electrical characteristics such as drain current were observed under different drain bias conditions. The electrical properties asymmetry of half-Corbino a-IGZO TFTs was explained by various geometrical factors owing to the short-channel effect. The reduced V-T and increased SS at V-DS = 15 V is explained by the drain-induced Schottky barrier lowering. In addition, the bias-temperature stress (BTS) was performed for half-Corbino a-IGZO TFTs with both amorphous silicon oxide (a-SiOx) single layer and a-SiOx/amorphous silicon nitride (a-SiNx) bilayer passivation (PV) structures. The device with bilayer PV shows a threshold voltage shift (Delta V-T) of + 2.07 and -0.5 V under positive (PBTS = + 15 V) and negative BTS (NBTS = -15 V) at 70 degrees C for 10 ks, respectively. The origins of Delta V-T during PBTS and NBTS for half-Corbino a-IGZO TFTs with single and bilayer PV structures were studied. To improve the device electrical stability, the bilayer PV structure should be used. (C) 2016 Elsevier Ltd. All rights reserved.
Keywords:Thin-film transistors;Amorphous In-Ga-Zn-O;Corbino;Asymmetric electrical properties;Short-channel effect;Bias-temperature stability