Aluminum-doped zinc oxide thin films with different thicknesses were deposited using a radio frequency sputtering system. As thickness increased, crystallinity improved and resistivity decreased. The optical transmittance of the films was over 80%. Well-aligned zinc oxide nanorods were synthesized on aluminum doped zinc oxide thin films in the chemical bath deposition. Itwas found that the morphological, structural, and optical properties of zinc oxide nanorods were significantly influenced by thicknesses of aluminum-doped zinc oxide films. Zinc oxide nanorods exhibited better crystallinity as film thickness increased. High transmittance of over 65% was obtained from zinc oxide nanorods. Vertical alignment of zinc oxide nanorods was dependent on growth direction of aluminum-doped zinc oxide films. (C) 2015 Elsevier B.V. All rights reserved.