Vanadium oxide and fluorine doped vanadium oxide thin films were deposited on the micro-slide glass substrates at 400 degrees C by spray pyrolysis technique. Vanadium oxide films were deposited using 0.1 M ammonium meta vanadate aqua solution. Precursor solution used to deposit fluorine doped vanadium oxide films was prepared adding separately 5 wt.%, 10 wt.%, 15 wt.% and 20 wt.% of ammonium fluoride with the 0.1 M ammonium meta vanadate aqua solution. X-ray diffraction results showed that the films are in mixed phases of beta-V2O5, V2O5 and V3O7. Surface morphology and band gap of these films were modified due to different levels of fluorine doping. The average visible transmittance (500-800 nm) of vanadium oxide films is decreased due to low level concentration of fluorine doping. (C) 2016 Published by Elsevier B.V.