In this study, LiCoO2 thin films were investigated for data storage applications based on scanning probe mediated approaches. LiCoO2, compared to other materials proposed for scanning probe mediated nanoscale patterning, is highly stable and exhibits reversible electrochemical surface modifications. LiCoO2 thin films have been grown by pulsed laser deposition on Al2O3 and Si substrates over a range of deposition temperatures. The crystal structure and the microstructure of the films has been inferred through in- and out-of-plane X-ray diffraction studies and high-resolution transmission electron microscopy, respectively. The influence of the film deposition temperature on the surface electrical properties of the LiCoO2 films is discussed along with the relevant mechanism of surface resistance modification. (C) 2016 Elsevier B.V. All rights reserved.