Silicon carbide films were synthesized at varied temperatures by radio frequency magnetron sputtering to improve the tritium permeation resistance of 316L stainless steel. The microstructure, morphology and composition were characterized by X-ray diffraction (XRD), field emission scanning electric microscopy (FESEM), atomic force microscopy (AFM) and X-ray photoelectron spectroscopy (XPS). The adhesion strength was investigated by scratching method. Deuterium permeation behavior was investigated using a quadruple mass spectrometer. The results showed that SiC films were uniform and amorphous. The SiC film deposited at 473 K showed best adhesion property. The 0.2-mu m SiC film on 316L stainless steel reduces permeability by a factor up to about 200, and higher permeation reduced factor (PRF) can be obtained by optimizing the coating process. (C) 2016 Hydrogen Energy Publications LLC. Published by Elsevier Ltd. All rights reserved.