To improve the electrically assisted patterning process and create smaller sized features with the higher active surface area, the combined thermocapillary-electrohydrodynamic (TC-EHD) instability of liquid nanofilms is considered. First, the 3-D thin film equation is rederived for nonisothermal films and then the influential factors, on the dynamics and stability of thin liquid film are found using linear stability (LS) analysis. Nonlinear studies are also conducted to investigate the long-time evolution of the interface using an in-house developed Fortran code employing high order finite difference and adaptive time step solver for the spatial and time derivatives. The number density of pillars (columnar raised structure) formed in 1 mu m(2) area is significantly increased compared to the EHD base-case and nanosized pillars are created due to the thermocapillary effects. Relative interface area increases of up to 18% due to this pattern miniaturization are realized. It is also found that increase in the thermal conductivity ratio of layers changes the mechanism of pattern formation resulting in nonuniform and randomly distributed micro pillars being generated.