CoSix/CNTs catalysts with different CoSix phases (Co2Si, CoSi) have been rapidly synthesized via a multi-step microwave-assisted chemical vapor deposition method. The catalysts were evaluated for the liquid phase hydrogenation of phthalic anhydride to produce phthalide, which is an important industrial intermediate for pharmaceuticals, fine chemicals and organic synthesis. The prepared CoSix/CNTs catalysts exhibited not only similar selectivity (81.0% selectivity to phthalide at 220 degrees C) compared with the Co/ CNTs catalyst, but also exhibited much better activity (94.1% conversion of phthalic anhydride at 220 degrees C) than Co/CNTs catalyst (80.0% conversion of phthalic anhydride at 220 degrees C) under mild reaction conditions (190-230 degrees C and 4.0 MPa Hz). (C) 2016 Elsevier B.V. All rights reserved.