We investigated the capillary filling kinetics of deionized water in nanochannels with heights of 50-120 nm. The measured position of the moving meniscus was proportional to the square root of time, as predicted by the LW equation. However, the extracted slopes were significantly smaller than the predictions based on the bulk properties. This unusual behavior was found to be mainly caused by the electro-viscous effect and dynamic contact angle, which was significantly larger than the static angle. In addition, when the filling distance reached about 600 mu m, bubbles tended to be formed, leading to the main meniscus was almost immobile. (C) 2016 Elsevier B.V. All rights reserved.