Vertically aligned silicon nanowire (SiNW) arrays are synthesized using low-cost Ag-assisted electro-less etching on p (100) Si wafer substrates. The SiNW arrays exhibit large scale and high porosity, as shown by the SEM image of SiNWs aligned vertically on the surface of a Si wafer. The n-TiO2/p-SiNWs heterojunction diode is fabricated using radio frequency magnetron sputtering of a TiO2 thin film (about 150 nm) onto vertically aligned p-Si nano wire arrays. The TiO2 modification increases the surface energy of the SiNW arrays. The high-resolution transmission electron microscopy (HRTEM) image and the corresponding selected area electron diffraction (SAED) pattern, for the TiO2 layer show polycrystalline characteristics and the crystal structure of TiO2 layer is anatase. The optoelectronic performance of n-TiO2/p-SiNWs heterojunction is determined using current-voltage (I-V) measurements. There is a well-defined rectifying behavior with a low turn-on voltage of about 0.8 V in forward bias. The experimental results show that the SiNW arrays are shorter and the resistance is lower, which gives better cell performance. (C) 2016 Elsevier B.V. All rights reserved.