Hybrid solar cells have gained much attention because of their simple mechanism and low cost as compared to the conventional p-n Si solar cells. We fabricated hybrid solar cells using micro(nano) patterned n-Si substrates. The patterns were formed using nanoimprint lithography and a simple metal-assisted chemical etching method. Owing to the increased light absorption and superior carrier collection ability of the cells, more carriers were generated and effectively collected, which resulted in higher short circuit currents. The short circuit current density and conversion efficiency of PEDOT:PSS Si hybrid solar cell containing the nano-hole patterned Si structures were 24% and 40%, respectively. (C) 2016 Elsevier B.V. All rights reserved.