Yttria-stabilized zirconia (YSZ) is the Most commonly used electrolyte material for solid oxide fuel cells. The use of relatively inexpensive metal components would require a trade-off in the lowering of the operating temperature below 800 degrees C. However, the reduced temperature results in an increased, resistivity of YSZ. This can be overcome by reducing the electrolyte thickness using thin film techniques. In this study, the preparation of a thin film of YSZ via the sputter deposition technique was reported. YSZ electrolyte films were deposited on anode substrates at 650/750 degrees C. The gas permeability test indicated, a gas-tight electrolyte with a gas leak rate <6.65 x 10(-7) lcm(-2) s(-1). The measured open circuit voltage was 1.1 V, while the maximum power density was 515 mW cm(-2). (C) 2016 Elsevier B.V. All rights reserved.