화학공학소재연구정보센터
Journal of Crystal Growth, Vol.456, 91-96, 2016
Homoepitaxial growth of HVPE-GaN doped with Si
Results of growth of high structural quality gallium nitride single crystals doped with silicon are described in this paper. Dichlorosilane was used as precursor of silicon in the hydride vapor phase epitaxy method. Crystallization runs with different flows of dichlorosilane were performed and compared. One inch free-standing HVPE-GaN crystals of high structural quality and high purity, previously grown on ammonothermal GaN substrates, were used as seeds. Structural, electrical, and optical properties of HVPE-GaN doped with silicon are presented and discussed in detail. A laser diode built on the homo-epitaxially grown GaN is demonstrated. (C) 2016 Elsevier B.V. All rights reserved.