Recently, organometal halide perovskite solar cells have attracted great attention in photovoltaic research. However, the devices require high-temperature processing of up to 450 C that hinders the applications in the low cost and large-area product of devices. Here, we reported the ITO/Ag grid/AZO hybrid electrodes for planar perovskite solar cells fabricated under the temperature of 150 degrees C. The planar perovskite solar cells do not require a mesoporous scaffold that need high-temperature annealing processing. The optimized ITO/Ag grid/AZO electrode which was fabricated as the sequence of ITO, Ag grid, AZO by magnetron sputtering exhibited an extreme low sheet resistance about 3.8 Omega/sq and a relative high transparency of 89.6% at the wavelength of 550 nm. The hybrid electrode could combine the electrical property of ITO and optical property of AZO. On the other hand, AZO has better energy level match with electron transport layer of ZnO than ITO. The power conversion efficiency (PCE) of 13.8% was obtained under the processing temperature of 150 degrees C by using ITO/Ag grid/AZO electrode. The high performances of the solar cells were attributed to the superior performances of ITO/Ag grid/AZO electrode and the good band energy match between ZnO and AZO. (C) 2016 Elsevier B.V. All rights reserved.