Solid-State Electronics, Vol.128, 172-179, 2017
Reconfigurable ultra-thin film GDNMOS device for ESD protection in 28 nm FD-SOI technology
We propose a novel ESD protection device (GDNMOS: Gated Diode merged NMOS) fabricated with 28 nm UTBB high-k metal gate technology. By modifying the combination of the diode and transistor gate stacks, the robustness of the device is optimized, achieving a maximum breakdown voltage (V-BR) of 4.9 V. In addition, modifications of the gate length modulate the trigger voltage (V-t1) with a minimum value of 3.5 V. Variable electrostatic doping (gate-induced) in diode and transistor body enables reconfigurable operation. A lower doping of the base enhances the bipolar gain, leading to thyristor behavior. This innovative architecture demonstrates excellent capability for high-voltage protection while maintaining a latch-up free behavior. (C) 2016 Elsevier Ltd. All rights reserved.