Thin Solid Films, Vol.622, 89-94, 2017
Adhesion behavior of diamond-like carbon films with F and Si co-doping prepared by radio frequency reactive magnetron sputtering
Diamond-like carbon (DLC) films with F and Si co-doping (DLC:F:Si films) were deposited on medical 316 L stainless steel substrates with radio frequency reactive magnetron sputtering by using trifluromethane (CHF3) and argon as source gases and SiC crystal target The relations between the RE input powers and adhesion behavior of DLC:F:Si films were investigated. Surface morphology and roughness, hardness, sp(2)/sp(3) hybridization ratio, and bonding configuration were characterized subsequently to demonstrate the adhesion evolution by Atomic force microscope (AFM), nanoindenter, Raman spectrometer, Fourier-transform infrared (FTIR) spectrometer and Friction and wear tester. The relative intensity of the -CF symmetric stretch vibration (1160 cm(-1)) to -CF2 asymmetric stretch vibration (1220 cm(-1)) and HFC=C< stretch vibration (1620 cm(-1)) to F2C=C