The voltage and current oscillations occasionally occur during the reverse recovery transient of the superjunction MOSFET body diode. This paper identifies the unique reverse recovery oscillation characteristics of the superjunction MOSFET body diode. Base on the experimental investigation and theoretical analysis, the various reverse recovery oscillation mechanisms are clarified. At first, with a discrete 650 V/47 A superjunction MOSFET utilized, the high-frequency and low-frequency oscillation characteristics during the reverse recovery transient are obtained by the double-pulse test. After the theoretical analysis, it is found that the superjunction MOSFET body diode has various oscillation mechanisms depending on its drift region injection level. Under high-level injection condition, the high-frequency oscillation occurs due to the plasma extraction transient-time (PETT) effect. Under low-level injection condition, the body diodes snappy reverse recovery results in the low-frequency LC oscillation. In the end of the paper, the oscillation behaviors under both high and low level injection conditions are reproduced by the mixed-mode numerical simulation, the simulation results validate the proposed oscillation mechanisms. (C) 2016 Elsevier Ltd. All rights reserved.