화학공학소재연구정보센터
Journal of Industrial and Engineering Chemistry, Vol.52, 7-11, August, 2017
Implementation of alternative gas compositions and effects on discharge properties of atmospheric pressure plasma in decomposition of CHF3
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Discharge properties of atmospheric pressure plasma depend on the composition of the plasma gas. The effects of gas composition on the discharge properties of the atmospheric pressure plasma were investigated in a dielectric barrier discharge reactor immersed in an oil bath for CHF3 decomposition. A variation of the CHF3 fraction of several thousandths (0-0.8%) in the feed led to a significant change in the electrical properties of the plasma discharge when N2 was a dilution gas; however, it did not occur with Ar or He as a dilution gas. Moreover, N2 dilution gas showed high-energy photons in the visible spectrum.
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