During femtosecond interaction with surfaces, the processes of liquid and solid-state dewetting could be responsible for the generation and regrouping of nanoparticles and nanoparticle clusters. The occurrence of surface plasmon polariton most probably induces the LIPSS arrangement. We have used low-fluence scanning femtosecond beam to generate sub-wavelength periodic structures on multilayer Ni/Pd thin films on Si. The spatial period of LIPSS increases with the change of scanning directions in respect to the polarization direction due to the phase difference increase between the incoming and induced oscillations. (c) 2017 Elsevier B.V. All rights reserved.