Pr-Fe co-doped SrTiO3 films are prepared by the metal organic deposition method on (111) Pt/Ti/SiO2/Si substrates. Their dielectric and electric modulus behaviors are investigated in the temperature range of 30-500 degrees C with different measuring frequency of 10(2)similar to 10(6) Hz. A typical ferroelectric relaxation phase transition is shown and its location shifts to the low temperature with the increase of Fe content. The imaginary parts of electric modulus M" exhibits the variable relaxation process with different Fe content, which is relation with OVs, PNRs and phase transition, and the possible causes of relaxation behavior dependence are analyzed in detail. (C) 2017 Elsevier B.V. All rights reserved.