This paper features the pulse polarity effect on ozone generation efficiency by adjusting the applied voltage and the flow rate in a coaxial dielectric barrier discharge reactor. Results show that utilization of unipolar pulse has better performance when compared with the bipolar mode, but on the other hand, utilization of the positive pulse has slightly higher efficiency than that of negative mode. Meanwhile, changing the gas flow rate shows a minor effect on ozone generation. Utilization of bipolar pulse would decrease the breakdown voltage and ozone generation efficiency when compared with unipolar pulse while it would lead to higher ozone concentrations at fixed applied voltage. The maximum ozone yield reaches 186.9 g/kWh at 6 kV positive pulse with ozone concentration of 11.9 g/Nm(3).