Thin Solid Films, Vol.634, 155-159, 2017
Highly moisture and weak-acid resistant Ga-doped ZnO films with titanium dioxide co-doping fabricated by magnetron sputtering
In this work, we proposed a strategy to improve the damp-heat stability and weak-acid resistance of gallium doped zinc oxide (GZO) thin films by co-doping TiO2 into GZO targets. Results showed that GZO thin films with a 0.2 wt% TiO2 co-doping in the target (GTZO) exhibited a resistivity of 5.1 x 10(-4) Omega.cm and an average transmittance of 82.9%. The relative change in sheet resistance was as low as 5.1% after 24 h damp heat treatment in conditions of 97% relative humidity at 121 degrees C. A craterlike textured surface with a high haze value was not found in GTZO thin films after dipping in 1 vol% HCl solution for 10 min. These results showed that GTZO thin films have great potential for use as transparent electrode in extreme outdoor conditions. (C) 2017 Published by Elsevier B.V.
Keywords:Gallium-doped zinc oxide;Titanium dioxide co-doping;Moisture resistance;Weak-acid resistance;Magnetron sputtering;Thin films