화학공학소재연구정보센터
Applied Surface Science, Vol.421, 430-434, 2017
Vacuum variable-angle far-infrared ellipsometer
We present the design and performance of a vacuum far-infrared (similar to 50-680 cm(-1)) ellipsometer witha rotating analyser. The system is based on a Fourier transform spectrometer, an in-house built ellipsometer chamber and a closed-cycle bolometer. The ellipsometer chamber is equipped with a computer controlled theta-2 theta goniometer for automated measurements at various angles of incidence. We compare our measurements on SrTiO3 crystal with the results acquired above 300 cm(-1) with a commercially available ellipsometer system. After the calibration of the angle of incidence and after taking into account the finite reflectivity of mirrors in the detector part we obtain a very good agreement between the data from the two instruments. The system can be supplemented with a closed-cycle He cryostat for measurements between 5 and 400 K. (C) 2016 Published by Elsevier B.V.